ICNCRE 2013

International Conference on Nanoelectronics, Communications and Renewable Energy 2013

 


ICNCRE 2013 Kokula Krishna Hari K
Short Title ICNCRE 2013
Publisher ASDF, India
ISBN 13 978-81-925233-8-5
ISBN 10 81-925233-8-1
Language English
Type Hard Bound - Printed Book
Copyrights admin@asdf.res.in
Editor-in-Chief Mohamed Rachid Mekideche
Conference Dates 22 - 23, September 2013
Venue Country Jijel, Algeria
Submitted Papers 477
Acceptance Rate 21.17%
Website www.asdf.org.in

Paper 010


Optimization of experimental Study of PECVD SiNx to Improve Antireflection and Passivation Coating Multicristalline Silicon Solar Cells

Optimization of experimental Study of PECVD SiNx to Improve Antireflection and Passivation Coating Multicristalline Silicon Solar Cells

S. Meziani1, A. Moussi2, A. El Amrani3, M. Mahiou4, R. Outemzabet5

1,2,3,4Centre de Recherche en Technologie des Semi-Conducteurs pour l´┐ŻEnergetique (CRSTE)
5Laboratoire des semi-conducteurs et oxydes metalliques, Universite des Sciences et de la Technologie Houari Boumediene, BP.

Abstract

Plasma Enhanced Chemical Vapor Deposition (PECVD) silicon nitride (SiNx:H, simply called SiNx) has been widely used in photovoltaic silicon solar cells as dielectric, because of low deposited temperature and compatibility with other process. SiNx gradually becomes the first choice in industry silicon solar cells production. Nowadays, in photovoltaic silicon solar cells, the excellent antireflection and passivation quality of PECVD SiNx have obvious effect on efficiency of solar cells. In this paper, we analysis several critical parameters for PECVD SiNx deposition, such as temperature of substrate, plasma power, ratio of NH3/SiH4 and deposition time, and to investigate optical properties such as weighted reflectance (Rw), ellipsometry measurement for SiNx thin film refractive indices and thickness, then we investigate the correlation between the ratio R=[NH3/SiH4] and plasma power with refractive indices and deposition rate. At last, we propose a set of optimized parameters for PECVD-SiNx deposition in silicon solar cells application.

Author's Profile

S. Meziani : Profile

A. Moussi : Profile

A. El Amrani : Profile

M. Mahiou : Profile

R. Outemzabet : Profile

Cite this Article as Follows

Meziani, S, Moussi, A, El Amrani, A, Mahiou M, Outemzabet R. Proceedings of The International Conference on Nanoelectronics, Communications and Renewable Energy 2013. Optimization of experimental Study of PECVD SiNx to Improve Antireflection and Passivation Coating Multicristalline Silicon Solar Cells. Vol. 1. Chennai: Association of Scientists, Developers and Faculties, 2013. 37-40. Print.